A 20 x 20 micron section of a Pentium 4 microprocessor was imaged using Xradia’s nanoXCT™ to demonstrate the capabilities of this sub 50 nm high resolution tool. In this application note a 3D volume of the chip was produced from a tomographic reconstruction utilizing 140 2D projections obtained by rotating the sample +/- 70 degrees in 1 degree intervals. The software capabilities to extract “virtual layers” from the reconstructed volume will also be demonstrated.
Reconstructed 3D volume
2D Transmission Image
This P4 CPU sample was imaged on a nanoXCT in transmission geometry with a Cu 8 kV x-ray source utilizing Zernike Phase Contrast Imaging. Typical spatial resolution obtained on the nanoXCT is sub- 50 nm. The smallest features on this sample are 90 nm.
The movie clip demonstrates the Virtual Delayering capability of the nanoXCT showing the ability to view internal structure and defects within the die without actually destroying or disassembling the specimen.
"Virtual Delayering" of the reconstructed 3D volume.
The images shown blow are extracted virtual layers from the reconstructed 3D volume of the P4 CPU. The software allows the user to extract the individual layers from the 3D reconstruction to view specific layers of interest.
