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Use of the MicroXCT™ to Image Various Internal Defects in Semiconductor Packages

The Xradia MicroXCT is the proven leader for 3D imaging of internal structure within Semiconductor Packages. Xradia’s extensive 3D tomographic x-ray imaging experience in this area includes, but is not limited to:

  • Stacked Die – Certain Cracks, voids in adhesives, broken leads
  • BGA/Flip Chip Packages – Voids/cracks/shear in solder balls, delamination, incomplete fill, wetting issues
  • Internal Stress Damage – Level 1 (within die) and Level 2 (chip to board) reliability issues
  • Pb Free – Snowmen, wetting issues, whiskers
  • General Packaging – Broken or shorted leads, pump out of TIM (thermal interface material), warped die inside thermal sealed packages, Automotive packages and sensors, Fiber Optics, bond wire defects]
cracked solder solder voids au

This is an image of a cracked solder ball. After a customer determined that the device was problematic in electrical test, Xradia quickly determined the solder ball had cracked creating the open circuit.
Solder balls are typically 500-600 Microns in diameter

This image is an example of voiding in solder balls within a Semiconductor package. This imaging is achieved without any destructive decapsulation or disassembly of the device.

After determining the location of a failure by electrical test, finding the problematic nature of the failure is quick and easy with the MicroXCT. The MicroXCT can also be utilized to randomly scan for defects

This is an image of a defective Au bond wire. The unique advantage of Xradia’s MicroXCT is the ability to quickly generate a 3D tomographic image. This 3D device image was imaged and then rotated to reveal a internal broken wire that was not be seen in conventional 2D x-ray.

delamination inside a semiconductor package voids and cracks in a stacked die example of broken lead

This image is an example of delamination inside a Semiconductor Package that was located and imaged after performing a 3D tomographic reconstruction on a customers sample.

This image is an example of a crack in a stacked die. Although challenging, the MicroXCT has the unique ability to find certain cracks in stacked die and voids in adhesive within stacked die. Traditional 2D x-ray without full 3D tomographic reconstruction cannot see these very difficult low contrast failure modes.

This is an example of a broken lead within a Semiconductor package. The nature of the failure was easily determined with a quick 3D tomographic reconstruction of the device. The whole device was imaged internally on the Xradia MicroXCT without any preparation or decapsulation.

     

This a an example of a 3D reconstruction of a wire bond. The MicroXCT 3D tomographic movies allow the user to view wire bonds from 360 degrees to look for defects that traditionally have been difficult to find with traditional 2D x-ray or by destroying the device.

 

This image is an example of a defect in a Pb free solder bump. The MicroXCT’s capability to view internal structure in working die has allowed customers to determine the extent of Pb-free defects such as solder bump “snowmen” caused by wetting issues. These defects can create a huge reliability issue. After the 3D x-ray reconstruction the device is still intact for further electrical and reliability testing.

This is critical for Pb-free R&D for RoHS and Green requirements.