Located in Concord, California, near the heart of Silicon Valley, Xradia designs, develops and manufactures high-resolution 3D x-ray microscopes and x-ray imaging systems. Formed in 2000, Xradia is a privately held Delaware corporation that was established to commercialize the design and processing of zone plate optics for the development of state of the art x-ray microscope systems.
Because of their unique optical design, Xradia’s microscopes feature full 360° 3D tomography and the world’s only sub 100nm x-ray microscope system. The company has combined its core technology and extensive patent portfolio in x-ray optical components, with system concept and design and proprietary image processing software to develop an entirely new class of x-ray imaging instruments.
Xradia’s products include the nanoXCT™ sub-60nm resolution 3D x-ray microscope for die-level inspection, defect review and failure analysis; the MicroXCT™ 1.5μm resolution 3D microscope for semiconductor packaging inspection, defect detection and failure analysis, and the new nanoXFi™, sub 80nm resolution x-ray fluorescence imager.
Introduced in July of 2005, the nanoXFi is a unique x-ray imaging technology for use in conjunction with electron beam platforms, such as SEMs, TEMs and e-beam metrology tools. The nanoXFi provides element-specific, high-resolution, sub-surface mapping of structural features or defects within semiconductor wafers or other samples. While finding initial application in semiconductor metrology, the nanoXFi represents a significant new imaging technology for semiconductor inspection and general microscopy as well.
Central to the importance of high-resolution x-ray imaging for semiconductor inspection is the ability of x-rays to penetrate up to several millimeters of material, thereby enabling non-destructive analysis and inspection. The combination of no sample preparation with non-destructive analysis means faster turn-around time and more meaningful inspection data. Combining these features with true 3D tomography means that even the most subtle and challenging failures and defects can be fully and quickly revealed.
From Semiconductors to advanced materials and life sciences, Xradia’s microscope systems are providing unique and powerful new vision tools, enabling new advances in science and cost-saving solutions to industry.
