nanoXCT™

The nanoXCT is a revolutionary x-ray microscope system offering unprecedented resolution and 3D imaging for non-destructive, non-invasive investigations in a wide range of industrial and scientific applications at nanometer scale. From semiconductor failure analysis to drug discovery, molecular imaging, stem cell research and advanced materials development, the nanoXCT provides feature detection below 30nm and spatial resolution better than 50nm. The nanoXCT is a self-contained, stand-alone console instrument, complete with image reconstruction software, laboratory x-ray source, x-ray-safe enclosure and user-friendly computer interface for system operation.

Key nanoXCT features:

• Non-destructive 3D imaging at sub-50 nm resolution using Fresnel zone plates as objective lenses.
• Variable filed of view and magnification
• World's first turnkey nanoscale x-ray CT system.
• Fast and artifact- free detect localization
• X-POSE technology using Zernike phase
  imaging for dramatically improved imaging contrast
• Virtual cross sectioning and de-layering
• Fully automated data acquisition, hardware
  accelerated 3D tomographic reconstruction, and
  image analysis software
• Minimal sample preparation and modification

nanoXCT Applications :

• Semiconductor, Microelectronics, and MEMS nanoscale structure
  research and failure visualization
• Life science, pharmaceutical and advanced biomaterials research in molecular and cellular level
• Advanced materials research and development tools

See our application notes to learn more about the utility and versatility of this powerful new microscope.

X-ray computed tomography (XCT) offers powerful non-destructive three dimensional imaging capabilities that are widely used in diverse fields, such as medical diagnotics, biomedical and materials research, semiconductor manufacturing, fuel cell research and geology. These powerful imaging capabilities result from many intrinsic and desirable properties of x-rays, including short wavelength for high-resolution imaging, high penetration power for interior imaging of large and optically opaque objects, and unique elemental specific interaction for element qualitative and quantitative analysis.

Combing the desirable attributes of x-ray energy with proprietary optics, Xradia has developed a revolutionary new x-ray microscope. The nanoXCT is a high-resolution 3D x-ray transmission microscope system representing the first commercial x-ray microscope to incorporate x-ray optical components for beam focusing. Unlike conventional x-ray microscopes, the system resolution of the nanoXCT is determined by an imaging x-ray lens or Fresnel zone plate, rather than by the spot size of the x-ray source. The zone plate is a circular diffraction grating approximately 80µm in diameter and delivering a resolution of < 50nm, determined by the outermost zone width of 35 nm. Further technology development will yield sub-30nm resolution in future systems.

Xradia’s nanoXCT microscope systems are available at x-ray energies of 5.4 keV and 8 keV utilizing a commercially available laboratory x-ray source. In-house fabrication of the Fresnel zone plates with 1:20 aspect ratio and outermost zone widths as small as 35nm, enables spatial resolution better than 50 nm.

The nanoXCT is capable of operating in both conventional bright-field imaging mode, and in Zernike phase contrast mode. Bright-field imaging utilizes the x-ray absorption difference between materials in the sample to generate conventional 2D, and tomographic 3D images. Zernike phase-contrast imaging enables the differentiation of materials having similar density or x-ray opacity, which cannot be distinguished in conventional bright-field imaging.

Visit the nanoXCT image gallery to see examples of high-resolution 2D and 3D images and see our application notes to learn more about the utility and versatility of this powerful new microscope.

nanoXCT Series Specifications

Spatial Resolution	<50 nm
Discernable Feature Size	~ 30 nm
Field of View	20 µm x 20 µm
Sample Size	Up to 25mm x 25mm for 3D tomography
Energy	5.4 keVor 8 keV (Cr or Cu x-ray source target)
2D Imaging Time	< 10 Minutes
3D Imaging Time	2 to 8 Hours – sample dependent